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Dr.-Ing. Tobias Dirnecker
List of publications:
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Lehrstuhl für Elektronische Bauelemente
Project Leads
(1)
Project Memberships
(1)
Publications
(13)
Types of publications
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Journal article
Journal article
Book chapter / Article in edited volumes
Book chapter / Article in edited volumes
Authored book
Authored book
Translation
Translation
Thesis
Thesis
Edited Volume
Edited Volume
Conference contribution
Conference contribution
Other publication type
Other publication type
Unpublished / Preprint
Unpublished / Preprint
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Characterization of charging damage in plasma doping (2003)
Henke D, Walther S, Weemann J, Dirnecker T, Ruf A, Beyer A, Lee K
Conference contribution
Influence of photoresist pattern on charging damage during high current ion implantation (2002)
Dirnecker T, Ruf A, Frey L, Beyer A, Bauer A, Henke D, Ryssel H
Conference contribution, Conference Contribution
Plasma induced damage monitoring for HDP processes (2002)
Beyer A, Hausmann A, Junack M, Radecker J, Ruf A, Dirnecker T
Conference contribution
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