Simulation of ion beam direct structuring for 3D nanoimprint template fabrication

Lugstein A, Frey L, Bertagnolli E, Platzgummer E, Biedermann A, Langfischer H, Eder-Kapl S, Kuemmel M, Cernusca S, Loeschner H, Lehrer C (2006)

Publication Status: Published

Publication Type: Journal article, Original article

Publication year: 2006

Journal

Microelectronic Engineering Elsevier

Book Volume: 83

Pages Range: 936-939

DOI: 10.1016/j.mee.2006.01.140

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente

Involved external institutions

Technische Universität Wien / Vienna University of Technology AT Austria (AT)

How to cite

APA:

Lugstein, A., Frey, L., Bertagnolli, E., Platzgummer, E., Biedermann, A., Langfischer, H.,... Lehrer, C. (2006). Simulation of ion beam direct structuring for 3D nanoimprint template fabrication. Microelectronic Engineering, 83, 936-939. https://doi.org/10.1016/j.mee.2006.01.140

MLA:

Lugstein, A., et al. "Simulation of ion beam direct structuring for 3D nanoimprint template fabrication." Microelectronic Engineering 83 (2006): 936-939.

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