Dose-dependent milling efficiencies of helium and nitrogen beams in PMMA (2021) Ellrott G, Ogawa S, Uno M, Morita Y, Manoharan M, Kolesnik-Gray M, Krstic V, Mizuta H Journal article, Letter Development of electrically conductive microstructures based on polymer/CNT nanocomposites via two-photon polymerization (2017) Staudinger U, Zyla G, Krause B, Janke A, Fischer D, Esen C, Voit B, Ostendorf A Journal article Complex 3D structures via double imprint of hybrid structures and sacrificial mould techniques (2017) Steinberg C, Rumler M, Manuel RA, Papenheim M, Wang S, Mayer A, Becker M, et al. Journal article Fabrication of adjacent micropillar arrays with different heights for cell studies (2016) Wei J, Shi J, Wang B, Tang Y, Tu X, Roy E, Ladoux B, Chen Y Journal article Monolithic 3D TSV-based high-voltage, high-temperature capacitors (2016) Gruenler S, Rattmann G, Erlbacher T, Bauer AJ, Frey L Journal article, Original article Structure and composition of Silicon-Germanium-Tin microstructures obtained through Mask Projection assisted Pulsed Laser Induced Epitaxy (2014) Stefanov S, Serra C, Benedetti A, Carlos Conde J, Werner J, Oehme M, Schulze J, et al. Journal article Fabrication of micro- and submicrometer silver patterns by microcontact printing of mercaptosilanes and direct electroless metallization (2013) Mondin G, Schumm B, Fritsch J, Grothe J, Kaskel S Journal article Electronic structure of lanthanide oxide high K gate oxides (2013) Gillen R, Robertson J Journal article, Original article Defect densities inside the conductive filament of RRAMs (2013) Robertson J, Gillen R Journal article, Original article Bimodal CAFM TDDB distributions in polycrystalline HfO2 gate stacks: The role of the interfacial layer and grain boundaries (2013) Iglesias V, Martin-Martinez J, Porti M, Rodriguez R, Nafria M, Aymerich X, Erlbacher T, et al. Journal article, Original article