Microelectronic Engineering

Journal Abbreviation: MICROELECTRON ENG
ISSN: 0167-9317
Publisher: Elsevier

Publications (37)


Types of publications

Journal article
Unpublished / Preprint

Publication year



Dose-dependent milling efficiencies of helium and nitrogen beams in PMMA (2021) Ellrott G, Ogawa S, Uno M, Morita Y, Manoharan M, Kolesnik-Gray M, Krstic V, Mizuta H Journal article, Letter Development of electrically conductive microstructures based on polymer/CNT nanocomposites via two-photon polymerization (2017) Staudinger U, Zyla G, Krause B, Janke A, Fischer D, Esen C, Voit B, Ostendorf A Journal article Complex 3D structures via double imprint of hybrid structures and sacrificial mould techniques (2017) Steinberg C, Rumler M, Manuel RA, Papenheim M, Wang S, Mayer A, Becker M, et al. Journal article Monolithic 3D TSV-based high-voltage, high-temperature capacitors (2016) Gruenler S, Rattmann G, Erlbacher T, Bauer AJ, Frey L Journal article, Original article Structure and composition of Silicon-Germanium-Tin microstructures obtained through Mask Projection assisted Pulsed Laser Induced Epitaxy (2014) Stefanov S, Serra C, Benedetti A, Carlos Conde J, Werner J, Oehme M, Schulze J, et al. Journal article Fabrication of micro- and submicrometer silver patterns by microcontact printing of mercaptosilanes and direct electroless metallization (2013) Mondin G, Schumm B, Fritsch J, Grothe J, Kaskel S Journal article Electronic structure of lanthanide oxide high K gate oxides (2013) Gillen R, Robertson J Journal article, Original article Defect densities inside the conductive filament of RRAMs (2013) Robertson J, Gillen R Journal article, Original article Bimodal CAFM TDDB distributions in polycrystalline HfO2 gate stacks: The role of the interfacial layer and grain boundaries (2013) Iglesias V, Martin-Martinez J, Porti M, Rodriguez R, Nafria M, Aymerich X, Erlbacher T, et al. Journal article, Original article Processing of silicon nanostructures by Ga+ resistless lithography and reactive ion etching (2013) Rommel M, Rumler M, Haas A, Bauer AJ, Frey L Journal article, Original article
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