Simulation of ion beam direct structuring for 3D nanoimprint template fabrication - Lugstein, A.; Frey, Lothar; Bertagnolli, E.; Platzgummer, E.; Biedermann, A.; Langfischer, H.; Eder-Kapl, S.; Kuemmel, M.; Cernusca, S.; Loeschner, H.; Lehrer, C. (Microelectronic Engineering, 2006)
Keywords: Ion beam induced deposition; Ion beam induced etching; Re-deposition; Ion sputtering; Nanowire fabrication