MeV-proton channeling in crystalline silicon

Jelinek M, Schustereder W, Laven JG, Schulze HJ, Kirnstoetter S, Rommel M, Frey L (2014)

Publication Status: Published

Publication Type: Conference contribution, Conference Contribution

Publication year: 2014

Publisher: Institute of Electrical and Electronics Engineers Inc.

Article Number: 6940059

ISBN: 9781479952120

DOI: 10.1109/IIT.2014.6940059

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente

Involved external institutions

Infineon Technologies AG DE Germany (DE) Infineon Technologies Austria AG AT Austria (AT) Technische Universität Graz AT Austria (AT) Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB) DE Germany (DE)

How to cite

APA:

Jelinek, M., Schustereder, W., Laven, J.G., Schulze, H.J., Kirnstoetter, S., Rommel, M., & Frey, L. (2014). MeV-proton channeling in crystalline silicon. In Proceedings of the 20th International Conference on Ion Implantation Technology, IIT 2014. Institute of Electrical and Electronics Engineers Inc..

MLA:

Jelinek, M., et al. "MeV-proton channeling in crystalline silicon." Proceedings of the 20th International Conference on Ion Implantation Technology, IIT 2014 Institute of Electrical and Electronics Engineers Inc., 2014.

BibTeX: Download