MeV-proton channeling in crystalline silicon - Jelinek, M.; Schustereder, W.; Laven, J. G.; Schulze, H. J.; Kirnstoetter, S.; Rommel, M.; Frey, Lothar (20th International Conference on Ion Implantation Technology, IIT 2014, 2014)
Keywords: channeling; proton implantation; crystalline silicon