SiC ceramic micropatterns from polycarbosilanes

Jang YS, Jank M, Maier V, Durst K, Travitzky N, Zollfrank C (2010)

Publication Type: Journal article

Publication year: 2010

Journal

Book Volume: 30

Pages Range: 2773-2779

Journal Issue: 13

DOI: 10.1016/j.jeurceramsoc.2010.05.019

Abstract

Micropatterned SiC ceramics were fabricated from polycarbosilanes applying a softlithographic replication technique. A polydimethylsiloxane mould replicated from a photolithographic microstructured silicon wafer was used as master structure. The polydimethylsiloxane mould was coated with a solution containing a mixture of two different polycarbosilanes in n-octane. After treatment at 200--400~°C the cross-linked polycarbosilane films were debonded and pyrolysed at 900~°C in nitrogen and subsequently crystallised at temperatures up to 1500~°C in argon. The cross-linking and thermal degradation behaviour of the polycarbosilanes was investigated by Fourier-transform infrared spectroscopy, differential scanning calorimetry and thermogravimetric analysis. X-ray diffractrometry showed the expected development of a nanocrystalline \textgreekb-SiC (3~nm) as the main phase with increasing temperature. However, traces of \textgreeka-SiO2 derived from the polycarbosilane precursors were also detected by X-ray analysis. Removal of the \textgreeka-SiO2 dioxide with hydrofluoric acid in the pyrolysed samples and subsequent increased the crystallite size to 7~nm. The Young's modulus determined by nanoindentation was increased from 3~GPa after cross-linking to 110~GPa after crystallisation. Scanning electron microscopy revealed, that the initial micropatterns were fully retained in the pyrolysed and crystallised SiC ceramics. The micropatterned cross-linked and crystallised \textgreekb-SiC based substrates exhibited light scattering characteristics, which qualify them as promising candidates for diffractive optical elements in microoptical applications.

Authors with CRIS profile

Additional Organisation(s)

Involved external institutions

Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB) Germany (DE)

How to cite

APA:

Jang, Y.-S., Jank, M., Maier, V., Durst, K., Travitzky, N., & Zollfrank, C. (2010). SiC ceramic micropatterns from polycarbosilanes. Journal of the European Ceramic Society, 30(13), 2773-2779. https://doi.org/10.1016/j.jeurceramsoc.2010.05.019

MLA:

Jang, Yeon-Suk, et al. "SiC ceramic micropatterns from polycarbosilanes." Journal of the European Ceramic Society 30.13 (2010): 2773-2779.

BibTeX: Download