Journal of Vacuum Science & Technology B
Journal Abbreviation: J VAC SCI TECHNOL B
ISSN: 1071-1023
Publisher: American Institute of Physics (AIP)
Publications (14)
Visualizing ion transport mechanisms through oxide scales grown on mixed nickel- and cobalt-base model alloys at 900 °c using FIB-SIMS techniques (2018)
Chater RJ, Weiser M, Virtanen S
Journal article, Original article
Modeling of ion drift in 4H-SiC-based chemical MOSFET sensors (2015)
Erlbacher T, Schwarzmann H, Bauer AJ, Doehler GH, Schreivogel M, Lutz T, Guillen FH, et al.
Journal article
Fabrication and characterization of glassy carbon membranes (2014)
Koval Y, Geworski A, Gieb K, Lazareva I, Müller P
Journal article, Original article
Accuracy of wafer level alignment with substrate conformal imprint lithography (2013)
Fader R, Rommel M, Bauer A, Rumler M, Frey L, Verschuuren MA, Van De Laar R, et al.
Journal article
Electrical investigations on metal/ferroelectric/insulator/semiconductor structures using poly[vinylidene fluoride trifluoroethylene] as ferroelectric layer for organic nonvolatile memory applications (2009)
Henkel K, Lazareva I, Mandal D, Paloumpa J, Koval Y, Müller P
Journal article, Original article
UV nanoimprint materials: Surface energies, residual layers, and imprint quality (2007)
Schmitt H, Frey L, Ryssel H, Rommel M, Lehrer C
Journal article
Interpretation of atomic friction experiments based on atomistic simulations (2007)
Maier S
Journal article
Integration of field emitters into scanning probe microscopy sensors using focused ion and electron beams (2004)
Lehrer C, Frey L, Petersen S, Ryssel H, Schäfer M, Sulzbach T
Journal article, Original article
Mechanism of etching and surface relief development of PMMA under low-energy ion bombardment (2004)
Koval Y
Journal article, Original article
Limitations of focused ion beam nanomachining (2001)
Lehrer C, Frey L, Petersen S, Ryssel H
Journal article, Original article