Nanomess- und positioniermaschine SIOS NMM-1 (SIOS)

Model: Nanomessmaschine NMM-1

Manufacturer: SIOS (2001)

Location: Erlangen

Usage: Internal only

Pictures

Equipment picture
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Types of publications

Journal article
Book chapter / Article in edited volumes
Authored book
Translation
Thesis
Edited Volume
Conference contribution
Other publication type
Unpublished / Preprint

Publication year

From
To

Abstract

Journal

Effect of a Misidentified Centre of a Type ASG Material Measure on the Determined Topographic Spatial Resolution of an Optical Point Sensor (2022) Schaude J, Gröschl AC, Hausotte T Journal article Atomic Force Microscope with an Adjustable Probe Direction and Integrated Sensing and Actuation (2022) Schaude J, Hausotte T Journal article, Original article Redesigned Sensor Holder for an Atomic Force Microscope with an Adjustable Probe Direction (2021) Schaude J, Fimushkin M, Hausotte T Journal article, Original article A metrological atomic force microscope system (2021) Wu Y, Wirthmann E, Klöpzig U, Hausotte T Journal article, Original article Bidirectional confocal measurement of a microsphere (2021) Schaude J, Baumgärtner B, Hausotte T Journal article Investigations on the measurement precision of an atomic force microscope with an adjustable probe direction (2021) Schaude J, Hausotte T Conference contribution, Conference Contribution Stitched open-loop measurements with a focal-distance-modulated confocal sensor (2021) Schaude J, Gröschl AC, Hausotte T Journal article Investigation of a metrological atomic force microscope system with a combined cantilever position, bending and torsion detection system (2020) Wu Y, Wirthmann E, Klöpzig U, Hausotte T Conference contribution, Original article Measurement of the Beruforge 152DL thin-film lubricant using a developed thin-film thickness standard (2020) Metzner S, Reuter T, Hausotte T Journal article Large range closed-loop scans with a focal-distance-modulated confocal sensor (2020) Schaude J, Gröschl AC, Hausotte T Journal article