Wu Y, Wirthmann E, Klöpzig U, Hausotte T (2020)
Publication Language: English
Publication Type: Conference contribution, Original article
Publication year: 2020
Publisher: AMA Service GmbH
City/Town: Wunstorf, Germany
Pages Range: 191-192
Conference Proceedings Title: Sensor and Measurement Science International 2020
Event location: Nuremberg
ISBN: 978-3-9819376-2-6
URI: https://www.ama-science.org/proceedings/details/3706
This article presents a new metrological atomic force microscope (MAFM) with adjustable beam posi-tion and direction of the cantilever measuring system. An interferometric measurement system measures the position of the cantilever and a quadrant photodiode detects the bending and torsion of the cantilever. To improve the signal quality and reduce disturbing interferences, the optical design was changed in comparison to the system of [3, 4]. The integration of the MAFM in the nanomeasur-ing machine (NMM-1) offers the possibility of large-scale measurements over a range of 25 mm × 25 mm × 5 mm with subnanometre resolution. A large number of measurements have been performed by this MAFM in combination with the NMM-1. In this short paper, examples of these measurements for determination of step height and pitch and the measurement of an area are demonstrated.
APA:
Wu, Y., Wirthmann, E., Klöpzig, U., & Hausotte, T. (2020). Investigation of a metrological atomic force microscope system with a combined cantilever position, bending and torsion detection system. In AMA Service GmbH (Eds.), Sensor and Measurement Science International 2020 (pp. 191-192). Nuremberg: Wunstorf, Germany: AMA Service GmbH.
MLA:
Wu, Yiting, et al. "Investigation of a metrological atomic force microscope system with a combined cantilever position, bending and torsion detection system." Proceedings of the Sensor and Measurement Science International, Nuremberg Ed. AMA Service GmbH, Wunstorf, Germany: AMA Service GmbH, 2020. 191-192.
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