SiC ceramic micropatterns from polycarbosilanes

Beitrag in einer Fachzeitschrift

Details zur Publikation

Autorinnen und Autoren: Jang YS, Jank M, Maier V, Durst K, Travitzky N, Zollfrank C
Zeitschrift: Journal of the European Ceramic Society
Jahr der Veröffentlichung: 2010
Band: 30
Heftnummer: 13
Seitenbereich: 2773-2779
ISSN: 0955-2219
eISSN: 1873-619X


Micropatterned SiC ceramics were fabricated from polycarbosilanes applying a softlithographic replication technique. A polydimethylsiloxane mould replicated from a photolithographic microstructured silicon wafer was used as master structure. The polydimethylsiloxane mould was coated with a solution containing a mixture of two different polycarbosilanes in n-octane. After treatment at 200--400~°C the cross-linked polycarbosilane films were debonded and pyrolysed at 900~°C in nitrogen and subsequently crystallised at temperatures up to 1500~°C in argon. The cross-linking and thermal degradation behaviour of the polycarbosilanes was investigated by Fourier-transform infrared spectroscopy, differential scanning calorimetry and thermogravimetric analysis. X-ray diffractrometry showed the expected development of a nanocrystalline \textgreekb-SiC (3~nm) as the main phase with increasing temperature. However, traces of \textgreeka-SiO2 derived from the polycarbosilane precursors were also detected by X-ray analysis. Removal of the \textgreeka-SiO2 dioxide with hydrofluoric acid in the pyrolysed samples and subsequent increased the crystallite size to 7~nm. The Young's modulus determined by nanoindentation was increased from 3~GPa after cross-linking to 110~GPa after crystallisation. Scanning electron microscopy revealed, that the initial micropatterns were fully retained in the pyrolysed and crystallised SiC ceramics. The micropatterned cross-linked and crystallised \textgreekb-SiC based substrates exhibited light scattering characteristics, which qualify them as promising candidates for diffractive optical elements in microoptical applications.

FAU-Autorinnen und Autoren / FAU-Herausgeberinnen und Herausgeber

Durst, Karsten PD Dr.
Lehrstuhl für Werkstoffwissenschaften (Allgemeine Werkstoffeigenschaften)
Maier, Verena
Lehrstuhl für Werkstoffwissenschaften (Allgemeine Werkstoffeigenschaften)
Travitzky, Nahum apl. Prof. Dr.
Lehrstuhl für Werkstoffwissenschaften (Glas und Keramik)
Zollfrank, Cordt PD Dr.
Lehrstuhl für Werkstoffwissenschaften (Glas und Keramik)

Zusätzliche Organisationseinheit(en)
Exzellenz-Cluster Engineering of Advanced Materials

Einrichtungen weiterer Autorinnen und Autoren

Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB)


E Lightweight Materials
Exzellenz-Cluster Engineering of Advanced Materials


Jang, Y.-S., Jank, M., Maier, V., Durst, K., Travitzky, N., & Zollfrank, C. (2010). SiC ceramic micropatterns from polycarbosilanes. Journal of the European Ceramic Society, 30(13), 2773-2779.

Jang, Yeon-Suk, et al. "SiC ceramic micropatterns from polycarbosilanes." Journal of the European Ceramic Society 30.13 (2010): 2773-2779.


Zuletzt aktualisiert 2019-15-07 um 11:17