MeV-proton channeling in crystalline silicon

Conference contribution
(Conference Contribution)


Publication Details

Author(s): Jelinek M, Schustereder W, Laven JG, Schulze HJ, Kirnstoetter S, Rommel M, Frey L
Publisher: Institute of Electrical and Electronics Engineers Inc.
Publication year: 2014
ISBN: 9781479952120


FAU Authors / FAU Editors

Frey, Lothar Prof. Dr.
Lehrstuhl für Elektronische Bauelemente


External institutions with authors

Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB)
Infineon Technologies AG
Infineon Technologies Austria AG
Technische Universität Graz


How to cite

APA:
Jelinek, M., Schustereder, W., Laven, J.G., Schulze, H.J., Kirnstoetter, S., Rommel, M., & Frey, L. (2014). MeV-proton channeling in crystalline silicon. In Proceedings of the 20th International Conference on Ion Implantation Technology, IIT 2014. Institute of Electrical and Electronics Engineers Inc..

MLA:
Jelinek, M., et al. "MeV-proton channeling in crystalline silicon." Proceedings of the 20th International Conference on Ion Implantation Technology, IIT 2014 Institute of Electrical and Electronics Engineers Inc., 2014.

BibTeX: 

Last updated on 2019-18-07 at 07:18