Physical modeling of side wall deposition by inclined electron beam evaporation

Liu Y, Ostermay I, Thies A (2025)

Publication Type: Journal article

Publication year: 2025

Journal

Journal of Vacuum Science & Technology B American Vacuum Society (AVS)

Publisher: AIP Publishing

Book Volume: 43

Journal Issue: 6

DOI: /10.1116/6.0004846

Authors with CRIS profile

Yujia Liu Lehrstuhl für Elektronische Bauelemente

Involved external institutions

Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik (FBH) DE Germany (DE)

How to cite

APA:

Liu, Y., Ostermay, I., & Thies, A. (2025). Physical modeling of side wall deposition by inclined electron beam evaporation. Journal of Vacuum Science & Technology B, 43(6). https://doi.org//10.1116/6.0004846

MLA:

Liu, Yujia, Ina Ostermay, and Andreas Thies. "Physical modeling of side wall deposition by inclined electron beam evaporation." Journal of Vacuum Science & Technology B 43.6 (2025).

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