Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics

ISSN: 2166-2754
eISSN: 0734-211X
Publisher: American Vacuum Society

Publications (10)

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Unpublished / Preprint

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Abstract

Strong-field electron emission from gold needle tips (2023) Heimerl J, Meier S, Kirchner A, Weitz T, Hommelhoff P Journal article Experimental considerations in electron beam transport on a nanophotonic chip using alternating phase focusing (2022) Shiloh R, Chlouba T, Hommelhoff P Journal article Ellipsometric analysis of concentration gradients induced in semiconductor crystals by pulsed laser induced epitaxy (2019) Schlipf J, Martin E, Stchakovsky M, Benedetti A, Fischer IA, Schulze J, Chiussi S Journal article Exploring the fabrication of Co and Mn nanostructures with focused soft x-ray beam induced deposition (2017) TU F, Späth A, Drost M, Vollnhals F, Krick Calderon S, Fink R, Marbach H Journal article Silicon nitride, a high potential dielectric for 600 v integrated RC-snubber applications (2015) Krach F, Schwarzmann H, Bauer A, Erlbacher T, Frey L Journal article, Original article Heusler nanoparticles for spintronics and ferromagnetic shape memory alloys (2014) Wang C, Meyer J, Teichert N, Auge A, Rausch E, Balke B, Huetten A, et al. Journal article, Review article Influence of parasitic capacitances on conductive AFM I-V measurements and approaches for its reduction (2013) Rommel M, Jambreck JD, Lemberger M, Bauer A, Frey L, Murakami K, Richter C, Weinzierl P Journal article, Original article Properties of SiO2 and Si3 N4 as gate dielectrics for printed ZnO transistors (2011) Walther S, Polster S, Meyer B, Jank MPM, Ryssel H, Frey L Journal article, Original article Fluorine implantation for effective work function control in p-type metal-oxide-semiconductor high-k metal gate stacks (2011) Fet A, Haeublein V, Bauer AJ, Ryssel H, Frey L Journal article, Original article Dielectric layers suitable for high voltage integrated trench capacitors (2011) vom Dorp J, Erlbacher T, Bauer AJ, Ryssel H, Frey L Journal article, Original article