Auto-ponderomotive beam guiding up to 9.5 keV

Schmidt-Kaler F, Walther J, Seidling M, Zimmermann R, Hommelhoff P (2025)


Publication Type: Journal article

Publication year: 2025

Journal

Book Volume: 43

Issue: 2

DOI: 10.1116/6.0004293

Abstract

We report successful electrostatic auto-ponderomotive (APE) electron beam guiding at electron energies of up to 

⁠. We do so with electrons derived from a scanning electron microscope and demonstrate the guiding along an S-shaped trajectory. For this S-shaped guide, we use a mirror-symmetrical double-planar electrode layout and apply static voltages only. We study details of the APE guiding process and show that we can extend its operability over almost three orders of magnitude in beam energy. In particular, we reach a range of electron energies often used in conventional scanning electron microscopes.

Authors with CRIS profile

How to cite

APA:

Schmidt-Kaler, F., Walther, J., Seidling, M., Zimmermann, R., & Hommelhoff, P. (2025). Auto-ponderomotive beam guiding up to 9.5 keV. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 43. https://doi.org/10.1116/6.0004293

MLA:

Schmidt-Kaler, Franz, et al. "Auto-ponderomotive beam guiding up to 9.5 keV." Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics 43 (2025).

BibTeX: Download