Adhesion strength of ductile thin film determined by cross-sectional nanoindentation
Zhao D, Letz S, Jank M, März M (2024)
Publication Type: Journal article
Publication year: 2024
Journal
Book Volume: 270
Article Number: 109103
DOI: 10.1016/j.ijmecsci.2024.109103
Abstract
Cross-sectional nanoindentation (CSN) is a powerful tool for measuring the adhesion strength of thin films. However, a quantitative assessment of interfacial properties for metal thin films on brittle substrates remains a challenge due to thin film ductility. In this work, we present a hierarchical analysis method to account for plastic dissipation during delamination. According to our observations, the CSN-induced wedge geometry is more complex than what is currently presented in literature. Therefore, we develop a three-dimensional finite element (FE) modelling strategy to simulate CSN-induced delamination. Furthermore, we present the mode mixity distribution during CSN measurement based on our simulation results. We find that a purely experimental assessment of adhesion strength by CSN for ductile thin films is imprecise due to the adhesion strength-dependent stress-state in this characterization technique. By using our combined experimental and numerical approach, the adhesion strength of EBPVD-deposited Al thin film on SiO
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Germany (DE)How to cite
APA:
Zhao, D., Letz, S., Jank, M., & März, M. (2024). Adhesion strength of ductile thin film determined by cross-sectional nanoindentation. International Journal of Mechanical Sciences, 270. https://doi.org/10.1016/j.ijmecsci.2024.109103
MLA:
Zhao, Dawei, et al. "Adhesion strength of ductile thin film determined by cross-sectional nanoindentation." International Journal of Mechanical Sciences 270 (2024).
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