Fastest thickness measurements with a Terahertz time-domain system based on electronically controlled optical sampling

Yahyapour M, Jahn A, Dutzi K, Puppe T, Leisching P, Schmauß B, Vieweg N, Deninger A (2019)

Publication Type: Journal article

Publication year: 2019

Journal

Applied Sciences MDPI

Book Volume: 9

Article Number: 1283

Journal Issue: 7

DOI: 10.3390/app9071283

Abstract

We apply a fast terahertz time-domain spectroscopy (TDS) system based on electronically controlled optical sampling (ECOPS) to contact-free thickness gauging. Our setup achieves a measurement speed of 1600 terahertz pulse traces per second, which-to our knowledge-represents the fastest thickness measurement performed with any terahertz system to-date. Using a silicon wafer as a test sample, we compare data of the ECOPS experiment to results obtained with a conventional terahertz TDS system and a mechanical micrometer gauge. We show that all systems provide consistent results within the measurement accuracy. Moreover, we perform thickness measurements of a rapidly moving sample and characterize the ECOPS setup with respect to time-domain dynamic range, signal-to-noise ratio, and spectral properties.

Authors with CRIS profile

Milad Yahyapour Professur für Hochfrequenztechnik mit dem Schwerpunkt Optische Hochfrequenztechnik und Photonik Bernhard Schmauß Professur für Hochfrequenztechnik mit dem Schwerpunkt Optische Hochfrequenztechnik und Photonik

Involved external institutions

TOPTICA Photonics AG DE Germany (DE)

How to cite

APA:

Yahyapour, M., Jahn, A., Dutzi, K., Puppe, T., Leisching, P., Schmauß, B.,... Deninger, A. (2019). Fastest thickness measurements with a Terahertz time-domain system based on electronically controlled optical sampling. Applied Sciences, 9(7). https://doi.org/10.3390/app9071283

MLA:

Yahyapour, Milad, et al. "Fastest thickness measurements with a Terahertz time-domain system based on electronically controlled optical sampling." Applied Sciences 9.7 (2019).

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