Characterization of ZnO structures by optical and X-ray methods

Petrik P, Pollakowski B, Zakel S, Gumprecht T, Beckhoff B, Lemberger M, Labadi Z, Baji Z, Jank M, Nutsch A (2013)

Publication Type: Journal article

Publication year: 2013

Journal

Applied Surface Science Elsevier

Book Volume: 281

Pages Range: 123-128

DOI: 10.1016/j.apsusc.2012.12.035

Abstract

ZnO thin films doped by Ga and In as well as multilayer structures of ZnO/Al2O3 have been investigated by X-ray fluorescence, Raman spectrometry, spectroscopic ellipsometry and vacuum ultra violet reflectometry. Systematic changes in the optical properties have been revealed even for Ga concentrations below 1%. The Raman active phonon mode of Ga doping at 580~cm$-$1 shows a correlation with the Ga concentration. Optical models with surface nanoroughness correction and different parameterizations of the dielectric function have been investigated. There was a good agreement between the dielectric functions determined by the Herzinger--Johs polynomial parameterization and by direct inversion. It has been shown that the correction of the nanoroughness significantly influences the accuracy of the determination of the layer properties. The band gap and peak amplitude of the imaginary part of the dielectric function corresponding to the excitonic transition changes systematically with the Ga-content and with annealing even for low concentrations.

Authors with CRIS profile

Thomas Gumprecht Technische Fakultät

Additional Organisation(s)

Exzellenz-Cluster Engineering of Advanced Materials (EAM)

Involved external institutions

Physikalisch-Technische Bundesanstalt (PTB) DE Germany (DE) Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB) DE Germany (DE) Institute of Technical Physics and Materials Science (MFA) HU Hungary (HU)

How to cite

APA:

Petrik, P., Pollakowski, B., Zakel, S., Gumprecht, T., Beckhoff, B., Lemberger, M.,... Nutsch, A. (2013). Characterization of ZnO structures by optical and X-ray methods. Applied Surface Science, 281, 123-128. https://dx.doi.org/10.1016/j.apsusc.2012.12.035

MLA:

Petrik, P., et al. "Characterization of ZnO structures by optical and X-ray methods." Applied Surface Science 281 (2013): 123-128.

BibTeX: Download