An improved method for point deflection measurements on rectangular membranes

Merle B, Nicholson KS, Herbert EG, Göken M (2016)

Publication Status: Published

Publication Type: Journal article

Publication year: 2016

Journal

Materials & Design Elsevier

Publisher: ELSEVIER SCI LTD

Book Volume: 109

Pages Range: 485-491

DOI: 10.1016/j.matdes.2016.07.054

Abstract

In this work, the recent theoretical advances for evaluating point deflection experiments are reviewed and further refined. An improved experimental approach based on measuring the contact stiffness during nanoindentation is implemented and applied to the evaluation of the residual stress in SiNx and gold membranes. The accuracy of the point deflection experiments is assessed by evaluating the same set of samples with the bulge test reference technique and comparing the residual stress results. It is shown that the new experimental method greatly improves the reproducibility of the measurement and that the updated evaluation scheme leads to a more reliable residual stress value. (C) 2016 Elsevier Ltd. All rights reserved.

Authors with CRIS profile

Benoit Merle Lehrstuhl für Werkstoffwissenschaften (Allgemeine Werkstoffeigenschaften) Mathias Göken Lehrstuhl für Werkstoffwissenschaften (Allgemeine Werkstoffeigenschaften)

Additional Organisation(s)

Exzellenz-Cluster Engineering of Advanced Materials (EAM) Interdisziplinäres Zentrum, Center for Nanoanalysis and Electron Microscopy (CENEM) Lehrstuhl für Werkstoffwissenschaften (Allgemeine Werkstoffeigenschaften)

Related research project(s)

In-situ nanomechanics and FIB tomography of thin films (EXC315 EAM (A2-3)) Exzellenz-Cluster Engineering of Advanced Materials Nov. 1, 2012 - Oct. 31, 2017

Involved external institutions

Michigan Technological University US United States (USA) (US)

How to cite

APA:

Merle, B., Nicholson, K.S., Herbert, E.G., & Göken, M. (2016). An improved method for point deflection measurements on rectangular membranes. Materials & Design, 109, 485-491. https://doi.org/10.1016/j.matdes.2016.07.054

MLA:

Merle, Benoit, et al. "An improved method for point deflection measurements on rectangular membranes." Materials & Design 109 (2016): 485-491.

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