Modification of polypropylene films for thin film capacitors by ion implantation

Haublein V, Birnbaum E, Ryssel H, Frey L, Grimm W (2014)

Publication Status: Published

Publication Type: Conference contribution, Conference Contribution

Publication year: 2014

Publisher: Institute of Electrical and Electronics Engineers Inc.

Article Number: 6939968

ISBN: 9781479952120

DOI: 10.1109/IIT.2014.6939968

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente

Involved external institutions

Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB) DE Germany (DE) EPCOS AG DE Germany (DE)

How to cite

APA:

Haublein, V., Birnbaum, E., Ryssel, H., Frey, L., & Grimm, W. (2014). Modification of polypropylene films for thin film capacitors by ion implantation. In Proceedings of the 20th International Conference on Ion Implantation Technology, IIT 2014. Institute of Electrical and Electronics Engineers Inc..

MLA:

Haublein, V., et al. "Modification of polypropylene films for thin film capacitors by ion implantation." Proceedings of the 20th International Conference on Ion Implantation Technology, IIT 2014 Institute of Electrical and Electronics Engineers Inc., 2014.

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