Laser melting of nanoparticulate transparent conductive oxide thin films

Baum M, Polster S, Jank M, Alexeev I, Frey L, Schmidt M (2013)

Publication Type: Journal article

Publication year: 2013


Publisher: Japan Laser Processing Society (JLPS)

Book Volume: 8

Pages Range: 144-148

Journal Issue: 2

DOI: 10.2961/jlmn.2013.02.0005


Layers of ZnO nanoparticles with thicknesses of about 40 nm were prepared on silicon sub-strates. The layers were irradiated by single pulses of a 248 nm excimer laser, which proofed suita-ble for consolidation and significant densification of the particle layers under ambient conditions. Experiments as well as simulations have confirmed that the application of a SiO2 particle layer be-tween the substrate and the ZnO particle layer can be used to hamper heat transfer towards the sub-strate. Thusthe ZnO layer can be thermally insulated from the substrate while heating the ZnO up to its extremelyhigh melting point. Consequently, such a layer stack could enable the application of consolidated particle layers on temperature-sensitive carrier substrates such as polymer foils which are to be used in low-cost mass production of devices like displays or solar cells.

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Baum, M., Polster, S., Jank, M., Alexeev, I., Frey, L., & Schmidt, M. (2013). Laser melting of nanoparticulate transparent conductive oxide thin films. Journal of Laser Micro Nanoengineering, 8(2), 144-148.


Baum, Marcus, et al. "Laser melting of nanoparticulate transparent conductive oxide thin films." Journal of Laser Micro Nanoengineering 8.2 (2013): 144-148.

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