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Optical measurement system for the determination of acoustic phase velocities with high accuracy

Holm A, Soelkner G, Ruile W, Weigel R (1994)

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Publication Type: Journal article

Publication year: 1994

Journal

Publisher: Ohmsha

Book Volume: 24

Pages Range: 317-323

Journal Issue: 1

Abstract

A technique for the optical measurement of the surface acoustic wavefield on piezo-electric materials has been developed. This allows the determination of the phase velocity with a resolution of 1.5 · 10-5. This fundamental parameter for the design of SAW devices can be measured as a function of crystal cut, temperature and frequency.

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How to cite

APA:

Holm, A., Soelkner, G., Ruile, W., & Weigel, R. (1994). Optical measurement system for the determination of acoustic phase velocities with high accuracy. Microelectronic Engineering, 24(1), 317-323.

MLA:

Holm, Andreas, et al. "Optical measurement system for the determination of acoustic phase velocities with high accuracy." Microelectronic Engineering 24.1 (1994): 317-323.

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