Thickness mapping of high-κ dielectrics at the nanoscale

Frey L, Trapnauskas J, Rommel M, Bauer AJ, Frey L (2014)

Publication Status: Published

Publication Type: Journal article, Original article

Publication year: 2014

Journal

Applied Physics Letters American Institute of Physics (AIP)

Publisher: American Institute of Physics Inc.

Book Volume: 104

Article Number: 052907

Journal Issue: 5

DOI: 10.1063/1.4863947

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente

Involved external institutions

Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB) DE Germany (DE)

How to cite

APA:

Frey, L., Trapnauskas, J., Rommel, M., Bauer, A.J., & Frey, L. (2014). Thickness mapping of high-κ dielectrics at the nanoscale. Applied Physics Letters, 104(5). https://doi.org/10.1063/1.4863947

MLA:

Frey, Lothar, et al. "Thickness mapping of high-κ dielectrics at the nanoscale." Applied Physics Letters 104.5 (2014).

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