Dreidimensionale elektrische Antastung für die Mikro- und Nanokoordinatenmesstechnik - 3-D-Tunnelstromtaster (3-D-Tunnelstromtaster)
Third party funded individual grant
Acronym:
3-D-Tunnelstromtaster
Start date :
01.01.2013
End date :
01.03.2017
Development of a 3D capable probing system based on electrical near-field interactions for micro- and nano-coordinate metrology (2016)
Sun Z, Hausotte T
Conference contribution, Conference Contribution
Development of a 3D tunneling current probing system for micro- and nano-coordinate metrology (2015)
Sun Z, Schuler A, Hausotte T
Conference contribution, Conference Contribution
Micro- and nanocoordinate measurements of micro-parts with 3-D tunnelling current probing (2015)
Schuler A, Hausotte T, Sun Z
Journal article, Review article
Update on a 3D probing system based on electrical near-field interaction for micro- and nano-coordinate metrology (2015)
Sun Z, Schuler A, Hausotte T
Conference contribution, Abstract of lecture