Maximilian Rumler

Lehrstuhl für Elektronische Bauelemente

One-step nanoimprinted Bragg grating sensor based on hybrid polymers (2018) Förthner M, Girschikofsky M, Rumler M, Stumpf F, Rommel M, Hellmann R, Frey L Journal article, Original article Complex 3D structures via double imprint of hybrid structures and sacrificial mould techniques (2017) Steinberg C, Rumler M, Manuel RA, Papenheim M, Wang S, Mayer A, Becker M, et al. Journal article Polymerization related deformations in multilayer soft stamps for nanoimprint (2017) Förthner M, Papenheim M, Rumler M, Stumpf F, Baier L, Rommel M, Scheer HC, Frey L Journal article, Original article Hybrid polymers processed by substrate conformal imprint lithography for the fabrication of planar Bragg gratings (2016) Förthner M, Rumler M, Stumpf F, Fader R, Rommel M, Frey L, Girschikofsky M, et al. Journal article Combination of direct laser writing and soft lithography molds for combined nano- and microfabrication (2016) Rumler M, Kollmuss M, Baier L, Michel F, Förthner M, Becker M, Rommel M, Frey L Conference contribution Comparison of silicon and 4H silicon carbide patterning using focused ion beams (2015) Kaliya Perumal Veerapandian S, Beuer S, Rumler M, Stumpf F, Thomas K, Pillatsch L, Michler J, et al. Journal article Inkjetable and photo-curable resists for large-area and high-throughput roll-to-roll nanoimprint lithography (2014) Thesen MW, Nees D, Ruttloff S, Rumler M, Rommel M, Schlachter F, Grützner S, et al. Journal article Bioactivation of plane and patterned PDMS thin films by wettability engineering (2014) Scharin M, Rommel M, Dirnecker T, Marhenke J, Herrmann B, Rumler M, Fader R, et al. Journal article Optical polymers with tunable refractive index for nanoimprint technologies (2014) Landwehr J, Fader R, Rumler M, Rommel M, Bauer A, Frey L, Simon B, et al. Journal article Enabling Large Area and High Throughput Roll-to-Roll NIL by Novel Inkjetable and Photo-curable NIL-Resists (2014) Thesen MW, Rumler M, Schlachter F, Grützner S, Moormann C, Rommel M, Nees D, et al. Conference contribution