Dr. Svetlana Beljakowa

List of publications:

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Lehrstuhl für Elektronische Bauelemente
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Types of publications

Journal article
Book chapter / Article in edited volumes
Authored book
Translation
Thesis
Edited Volume
Conference contribution
Other publication type
Unpublished / Preprint

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Abstract

Journal

Diffusion of Phosphorus and Boron from Atomic Layer Deposition Oxides into Silicon (2019) Beljakowa S, Pichler P, Kalkofen B, Hübner R Journal article Atomic layer deposition of phosphorus oxide films as solid sources for doping of semiconductor structures (2018) Kalkofen B, Ahmed B, Beljakowa S, Lisker M, Kim YS, Burte EP Conference contribution