Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB)

Research facility


Location: Erlangen, Germany (DE) DE

ISNI: 0000000104810543

ROR: https://ror.org/04q5rka56

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Types of publications

Journal article
Book chapter / Article in edited volumes
Authored book
Translation
Thesis
Edited Volume
Conference contribution
Other publication type
Unpublished / Preprint

Publication year

From
To

Abstract

Journal

Manufacturing, characterization, and application of nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy (2011) Jambreck JD, Yanev V, Schmitt H, Rommel M, Bauer AJ, Frey L Journal article, Original article Investigation of the reliability of 4H-SiC MOS devices for high temperature applications (2011) Le-Huu M, Schmitt H, Noll S, Grieb M, Schrey FF, Bauer AJ, Frey L, Ryssel H Journal article, Original article Influence of annealing parameters on surface roughness, mobility, and contact resistance of aluminium implanted 4H SiC (2011) Schmitt H, Haeublein V, Bauer A, Frey L Authored book, Volume of book series Impact of carbon junction implant on leakage currents and defect distribution: Measurement and simulation (2011) Roll G, Jakschik S, Burenkov A, Goldbach M, Mikolajick T, Frey L Journal article, Original article Comparative study on metallization and passivation materials for high temperature sensor applications (2011) Daves W, Krauss A, Le-Huu M, Kronmüller S, Haeublein V, Bauer A, Frey L Authored book, Volume of book series Amorphous silicon carbide thin films (a-SiC:H) deposited by plasma-enhanced chemical vapor deposition as protective coatings for harsh environment applications (2011) Daves W, Krauss A, Behnel N, Haeublein V, Bauer A, Frey L Journal article, Original article 4H-SiC n-MOSFET logic circuits for high temperature operation (2011) Frey L, Le-Huu M, Grieb M, Schrey F, Schmitt H, Haeublein V, Bauer A, Ryssel H Authored book, Volume of book series Dielectric layers suitable for high voltage integrated trench capacitors (2011) vom Dorp J, Erlbacher T, Bauer AJ, Ryssel H, Frey L Journal article, Original article Characterization of thickness variations of thin dielectric layers at the nanoscale using scanning capacitance microscopy (2011) Yanev V, Rommel M, Bauer AJ, Frey L Journal article, Original article Analysis of NbN thin film deposition by plasma-enhanced ALD for gate electrode application (2010) Hinz J, Bauer AJ, Frey L Journal article
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