Lehrstuhl für Elektronische Bauelemente

Characterization of charging damage in plasma doping (2003) Henke D, Walther S, Weemann J, Dirnecker T, Ruf A, Beyer A, Lee K Conference contribution Will Darwins's Law Help Us to Improve Our Resist Models? (2003) Tollkühn B, Fühner T, Matiut D, Erdmann A, Semmler A, Küchler B, Kókai G Conference contribution, Original article Optimization of one-and two dimensional masks in the optical lithography (2003) Farkas R, Kókai G, Erdmann A, Fühner T, Tollkühn B Conference contribution, Original article Mask and Source Optimization for Lithographic Imaging Systems (2003) Erdmann A, Farkas R, Fühner T, Tollkühn B, Kókai G Conference contribution, Original article Electrical Characterization of Zirconium Silicate Films Obtained from Novel MOCVD Precursors (2003) Paskaleva A, Lemberger M, Zürcher S, Bauer A, Frey L, Ryssel H Conference contribution Surface Properties and Electrical Characteristics of Rapid Thermal Annealed 4H-SiC (2003) Bauer A, Rambach M, Frey L, Weiss R, Rupp R, Friedrichs P, Schörner R, Peters DP Authored book, Volume of book series Nanoscale effects in focused ion beam processing (2003) Frey L, Lehrer C, Ryssel H Journal article, Review article Materials processing by focused ion beams for TEM sample preparation and nanostructuring Materialbearbeitung mittels fokussierter ionenstrahlen zur TEM-probenpräparation und nanostrukturierung (2003) Frey L, Lehrer C Journal article, Original article Development of enhanced depth-resolution technique for shallow dopant profiles (2002) Fujita M, Tajima J, Nakagawa T, Abo S, Kinomura A, Pászti F, Takai M, et al. Journal article, Original article MOCVD of titanium dioxide on the basis of new precursors (2002) Leistner T, Lehmbacher K, Härter P, Schmidt C, Bauer A, Frey L, Ryssel H Journal article, Original article