Application of a memetic algorithm to the calibration of micro-lithography

Christoph D, Fühner T, Tollkühn B, Erdmann A, Kókai G (2007)

Publication Language: English

Publication Type: Book chapter / Article in edited volumes

Publication year: 2007

Publisher: Springer

Edited Volumes: Hybrid Evolutionary Algorithms

City/Town: Berlin Heidelberg

Pages Range: 201-239

ISBN: 978-3-540-73296-9

DOI: 10.1007/978-3-540-73297-6

Authors with CRIS profile

Tim Fühner Lehrstuhl für Informatik 3 (Rechnerarchitektur)

How to cite

APA:

Christoph, D., Fühner, T., Tollkühn, B., Erdmann, A., & Kókai, G. (2007). Application of a memetic algorithm to the calibration of micro-lithography. In Grosan, Crina; Abraham, Ajith (Eds.), Hybrid Evolutionary Algorithms. (pp. 201-239). Berlin Heidelberg: Springer.

MLA:

Christoph, Dürr, et al. "Application of a memetic algorithm to the calibration of micro-lithography." Hybrid Evolutionary Algorithms. Ed. Grosan, Crina; Abraham, Ajith, Berlin Heidelberg: Springer, 2007. 201-239.

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