Journal of Vacuum Science & Technology B
Journal Abbreviation: JVSTB
ISSN: 2166-2746
eISSN: 1071-1023
Publisher: American Vacuum Society (AVS)
Publications (33)
Electrical investigations on metal/ferroelectric/insulator/semiconductor structures using poly[vinylidene fluoride trifluoroethylene] as ferroelectric layer for organic nonvolatile memory applications (2009)
Henkel K, Lazareva I, Mandal D, Paloumpa J, Koval Y, Müller P
Journal article, Original article
UV nanoimprint materials: Surface energies, residual layers, and imprint quality (2007)
Schmitt H, Frey L, Ryssel H, Rommel M, Lehrer C
Journal article
Interpretation of atomic friction experiments based on atomistic simulations (2007)
Maier S
Journal article
Integration of field emitters into scanning probe microscopy sensors using focused ion and electron beams (2004)
Lehrer C, Frey L, Petersen S, Ryssel H, Schäfer M, Sulzbach T
Journal article, Original article
Mechanism of etching and surface relief development of PMMA under low-energy ion bombardment (2004)
Koval Y
Journal article, Original article
Limitations of focused ion beam nanomachining (2001)
Lehrer C, Frey L, Petersen S, Ryssel H
Journal article, Original article
Field emitter array fabricated using focused ion and electron beam induced reaction (2000)
Yavas O, Ochiai C, Takai M, Park Y, Lehrer C, Lipp S, Frey L, et al.
Journal article, Original article
Tetramethoxysilane as a precursor for focused ion beam and electron beam assisted insulator (SiOx) deposition (1996)
Lipp S, Frey L, Lehrer C, Frank B, Demm E, Pauthner S, Ryssel H
Journal article, Original article
Investigations on the topology of structures milled and etched by focused ion beams (1996)
Lipp S, Frey L, Lehrer C, Frank B, Demm E, Ryssel H
Journal article, Original article
New-surface dopant passivation after wet-chemical preparation of Si (111):H surfaces (1996)
Ley L, Ristein J
Journal article