Fabrication and characterization of glassy carbon membranes (2014) Koval Y, Geworski A, Gieb K, Lazareva I, Müller P Journal article, Original article Accuracy of wafer level alignment with substrate conformal imprint lithography (2013) Fader R, Rommel M, Bauer A, Rumler M, Frey L, Verschuuren MA, Van De Laar R, et al. Journal article Influence of parasitic capacitances on conductive AFM I-V measurements and approaches for its reduction (2013) Rommel M, Jambreck JD, Lemberger M, Bauer A, Frey L, Murakami K, Richter C, Weinzierl P Journal article, Original article Analysis of the effect of germanium preamorphization on interface defects and leakage current for high-k metal-oxide-semiconductor field-effect transistor (2011) Roll G, Jakschik S, Goldbach M, Wachowiak A, Mikolajick T, Frey L Journal article, Original article Gate oxide reliability at the nanoscale evaluated by combining conductive atomic force microscopy and constant voltage stress (2011) Erlbacher T, Yanev VC, Rommel M, Bauer A, Frey L Journal article Properties of SiO2 and Si3 N4 as gate dielectrics for printed ZnO transistors (2011) Walther S, Polster S, Meyer B, Jank MPM, Ryssel H, Frey L Journal article, Original article Fluorine implantation for effective work function control in p-type metal-oxide-semiconductor high-k metal gate stacks (2011) Fet A, Haeublein V, Bauer AJ, Ryssel H, Frey L Journal article, Original article Dielectric layers suitable for high voltage integrated trench capacitors (2011) vom Dorp J, Erlbacher T, Bauer AJ, Ryssel H, Frey L Journal article, Original article Characterization of thickness variations of thin dielectric layers at the nanoscale using scanning capacitance microscopy (2011) Yanev V, Rommel M, Bauer AJ, Frey L Journal article, Original article Comprehensive study of focused ion beam induced lateral damage in silicon by scanning probe microscopy techniques (2010) Rommel M, Spoldi G, Yanev V, Beuer S, Amon B, Jambreck J, Petersen S, et al. Journal article, Original article