Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Journal Abbreviation: NUCL INSTRUM METH B
ISSN: 0168-583X
Publisher: Elsevier

Publications (34)

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A novel delineation technique for 2D-profiling of dopants in crystalline silicon (1993) Gong L, Frey L, Bogen S, Ryssel H Journal article, Original article High energy ion implantation for semiconductor application at Fraunhofer-AIS, Erlangen (1992) Frey L, Bogen S, Gong L, Jung W, Ryssel H, Gyulai J Journal article, Original article End-of-range disorder influenced by inherent oxygen in silicon (1992) Antos L, Gyulai J, Khanh N, Frey L Journal article, Original article Tribological properties of carbonized photoresist (1991) Oechsner R, Kluge A, Frey L, Ryssel H Journal article, Original article
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