Electron Probe Microanalyzer (EPMA) (JEOL)

• Five wavelength-dispersive spectrometers (WDS):
• Detectable element range: 4-Be to 92-U (all elements with Z > 3).
• Eight crystal types: TAP, PETJ, PETH, LDE1, LDE2, LDEB, LIF, and LIFH.
• Layered dispersive elements, gas-flow detectors allow light-element analyses.
• One energy-dispersive spectrometer (EDS):

Solid-state Si(Li) detector, liquid-nitrogen cooled, Ultrathin detector window.

• Secondary-electron (SE) and backscattered-electron (BSE) imaging:
• SE image resolution: 6 nanometers (at 30 kV accelerating voltage; 11 mm WD).
• BSE image modes: composition (sum) and topography (difference).
• Multi-element line analyses and area maps
• Matrix corrections using ZAF.
• High-speed large specimen stage (HSLSS XM-81010):

Maximum sample size: 100 x 100 x 50 mm (H).

Maximum analysable area: 90 x 90 mm.

• Accelerating voltage: 0.2 to 30 kV (0.1 kV steps).
• Electron probe current range: 10-12 to 10-5 A
• Electron probe current stability: ± 0.5 x 10-3/h; ± 3 x 10-3/12h
• Integrated visible-light microscopy: transmitted and reflected light

The JEOL JXA-8200 Superprobe in our institute is a high resolution SEM and a WD/ED Combined Electron Probe Microanalyzer (EPMA). The Electron gun consists of a tungsten cathode. Five wavelength dispersive X-ray spectrometers (WDS) and an energy dispersive X-ray spectrometer (EDS) gives the possibility of efficient and accurate analysis. The WDX spectrometers are able to analyse all elements Z > 3 with different crystals (LIF, PET, TAP) and LDE1, LDE2, LDEB for light elements (Be, B, C, N, O, F). In addition one can observed specimens with a visible-light microscope (reflected and transmitted light). This equipment allows to determine the chemical composition of different samples. The high-speed large specimen stage (HSLSS XM-81010) belongs to the Electron Probe Microanalyzer can handle samples up to 9 x 9 x 2 cm (L x B x H) through the airlock, and can reposition a sample to less than 0.5 um.