Nanometrology - Nanopositioning- and nanomeasuring machine with integrated nanoprobes
Jäger G, Hausotte T, Manske E, Büchner HJ, Mastylo R, Vorbringer-Dorozhovets N, Füßl R, Grünwald R (2006)
Publication Status: Published
Publication Type: Conference contribution
Publication year: 2006
Journal
Publisher: Trans Tech Publications
Book Volume: 505-507
Pages Range: 7-12
Abstract
The integration of several, optical and tactile probe systems and scanning force microscopes makes the NPM-Machine suitable for various tasks, such as large-area scanning probe microscopy, mask and water inspection, circuit testing as well as measuring optical and mechanical precision work pieces such as micro lens arrays, concave lenses, mm-step height standards.
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Germany (DE)How to cite
APA:
Jäger, G., Hausotte, T., Manske, E., Büchner, H.-J., Mastylo, R., Vorbringer-Dorozhovets, N.,... Grünwald, R. (2006). Nanometrology - Nanopositioning- and nanomeasuring machine with integrated nanoprobes. (pp. 7-12). Trans Tech Publications.
MLA:
Jäger, Gerd, et al. "Nanometrology - Nanopositioning- and nanomeasuring machine with integrated nanoprobes." Trans Tech Publications, 2006. 7-12.
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