ENHANCED PIEZOELECTRIC AL(1-X)SC(X)N RF-MEMS RESONATORS FOR SUB-6 GHZ RF-FILTER APPLICATIONS: DESIGN, FABRICATION AND CHARACTERIZATION

Bogner A, Bauder R, Timme HJ, Forster T, Reccius C, Weigel R, Hagelauer A (2020)


Publication Type: Conference contribution

Publication year: 2020

Journal

Publisher: IEEE

City/Town: NEW YORK

Pages Range: 1258-1261

Conference Proceedings Title: 2020 33RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2020)

Event location: Vancouver CA

Authors with CRIS profile

Involved external institutions

How to cite

APA:

Bogner, A., Bauder, R., Timme, H.-J., Forster, T., Reccius, C., Weigel, R., & Hagelauer, A. (2020). ENHANCED PIEZOELECTRIC AL(1-X)SC(X)N RF-MEMS RESONATORS FOR SUB-6 GHZ RF-FILTER APPLICATIONS: DESIGN, FABRICATION AND CHARACTERIZATION. In 2020 33RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2020) (pp. 1258-1261). Vancouver, CA: NEW YORK: IEEE.

MLA:

Bogner, Andreas, et al. "ENHANCED PIEZOELECTRIC AL(1-X)SC(X)N RF-MEMS RESONATORS FOR SUB-6 GHZ RF-FILTER APPLICATIONS: DESIGN, FABRICATION AND CHARACTERIZATION." Proceedings of the 33rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Vancouver NEW YORK: IEEE, 2020. 1258-1261.

BibTeX: Download