ENHANCED PIEZOELECTRIC AL(1-X)SC(X)N RF-MEMS RESONATORS FOR SUB-6 GHZ RF-FILTER APPLICATIONS: DESIGN, FABRICATION AND CHARACTERIZATION - Bogner, Andreas; Bauder, Ruediger; Timme, Hans-Joerg; Forster, Thomas; Reccius, Christian; Weigel, Robert; Hagelauer, Amelie (2020 33RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2020), 2020)
CRIS-Team WoS Importer:2020-10-02