Phosphorus Ion Shower Implantation for special power IC applications

Kröner F, Schork R, Frey L, Burenkov A, Ryssel H (2000)

Publication Status: Published

Publication Type: Conference contribution, Conference Contribution

Publication year: 2000

Pages Range: 476-479

Article Number: 924191

Event location: Alpbach

ISBN: 9780780364622

DOI: 10.1109/.2000.924191

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente Heiner Ryssel Technische Fakultät

Involved external institutions

Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB) DE Germany (DE)

How to cite

APA:

Kröner, F., Schork, R., Frey, L., Burenkov, A., & Ryssel, H. (2000). Phosphorus Ion Shower Implantation for special power IC applications. In Proceedings of the 2000 13th International Conference on Ion Implantation Technology, IIT 2000 (pp. 476-479). Alpbach.

MLA:

Kröner, F., et al. "Phosphorus Ion Shower Implantation for special power IC applications." Proceedings of the 2000 13th International Conference on Ion Implantation Technology, IIT 2000, Alpbach 2000. 476-479.

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