Improved delineation technique for two dimensional dopant profiling

Gong L, Petersen S, Frey L, Ryssel H (1995)

Publication Status: Published

Publication Type: Journal article, Original article

Publication year: 1995

Journal

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Elsevier

Book Volume: 96

Pages Range: 133-138

DOI: 10.1016/0168-583X(94)00472-2

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente Heiner Ryssel Technische Fakultät

Involved external institutions

Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB) DE Germany (DE)

How to cite

APA:

Gong, L., Petersen, S., Frey, L., & Ryssel, H. (1995). Improved delineation technique for two dimensional dopant profiling. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 96, 133-138. https://doi.org/10.1016/0168-583X(94)00472-2

MLA:

Gong, Li, et al. "Improved delineation technique for two dimensional dopant profiling." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 96 (1995): 133-138.

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