Analysis of microstructured samples by focused ion beam sample preparation

Frey L, Ergele W, Falter T, Gong L, Ryssel H (1993)

Publication Status: Published

Publication Type: Journal article, Original article

Publication year: 1993

Journal

Microelectronic Engineering Elsevier

Book Volume: 21

Pages Range: 375-378

DOI: 10.1016/0167-9317(93)90095-M

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente Heiner Ryssel Technische Fakultät

How to cite

APA:

Frey, L., Ergele, W., Falter, T., Gong, L., & Ryssel, H. (1993). Analysis of microstructured samples by focused ion beam sample preparation. Microelectronic Engineering, 21, 375-378. https://doi.org/10.1016/0167-9317(93)90095-M

MLA:

Frey, Lothar, et al. "Analysis of microstructured samples by focused ion beam sample preparation." Microelectronic Engineering 21 (1993): 375-378.

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