Bulk growth of SiC

Journal article
(Original article)

Publication Details

Author(s): Wellmann P, Müller R, Sakwe A, Künecke U, Hens P, Stockmeier M, Konias K, Hock R, Magerl A, Pons M
Editor(s): M. Dudley, C.M. Johnson, A.R. Powell, S. Ryu
Journal: Materials Research Society Symposium - Proceedings
Publisher: Materials Research Society
Publication year: 2008
Volume: 1069
Conference Proceedings Title: MRS Proceedings / Volume 1069 / 2008
Pages range: 3-14
ISSN: 0272-9172
Language: English


The paper reviews the basics of SiC bulk growth by the physical vapor transport (PVT) method and discusses current and possible future concepts to improve crystalline quality. In-situ process visualization using x-rays, numerical modeling and advanced doping techniques will be briefly presented which support growth process optimization. The ,,pure" PVT technique will be compared with related developments like the so called Modified-PVT, Continuous-Feeding-PVT, High-Temperature-CVD and Halide-CVD. Special emphasis will be put on dislocation generation and annihilation and concepts to reduce dislocation density during SiC bulk crystal growth. The dislocation study is based on a statistical approach. Rather than following the evolution of a single defect, statistic data which reflect a more global dislocation density evolution are interpreted. In this context a new approach will be presented which relates thermally induced strain during growth and dislocation patterning into networks.

FAU Authors / FAU Editors

Hens, Philip
Graduiertenzentrum der FAU
Hock, Rainer Prof. Dr.
Professur für Kristallographie und Strukturphysik
Konias, Katja
Professur für Werkstoffwissenschaften (Werkstoffe der Elektrotechnik)
Künecke, Ulrike Dr.-Ing.
Institute Materials for Electronics and Energy Technology (i-MEET)
Magerl, Andreas Prof. Dr.
Lehrstuhl für Kristallographie und Strukturphysik
Wellmann, Peter Prof. Dr.-Ing.
Professur für Werkstoffwissenschaften (Werkstoffe der Elektrotechnik)

How to cite

Wellmann, P., Müller, R., Sakwe, A., Künecke, U., Hens, P., Stockmeier, M.,... Pons, M. (2008). Bulk growth of SiC. Materials Research Society Symposium - Proceedings, 1069, 3-14. https://dx.doi.org/10.1557/PROC-1069-D01-01

Wellmann, Peter, et al. "Bulk growth of SiC." Materials Research Society Symposium - Proceedings 1069 (2008): 3-14.


Last updated on 2018-20-09 at 13:55