Modeling the evolution of ellipsometric data during the thermally induced Pt-silicide formation: activation energies and prefactors

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Details zur Publikation

Autorinnen und Autoren: Ley L, Hundhausen M
Titel Sammelwerk: Materials Research Society Symposium - Proceedings
Verlag: Materials Research Society
Jahr der Veröffentlichung: 1999
Tagungsband: Symposium. Materials Research Society
Seitenbereich: 145
ISSN: 0272-9172


The formation of Pt silicide (PtSi) by the thermally activated reaction of a 23 nm Pt layer on Si was monitored in situ by ellipsometry. Characteristic changes in the ellipsometric angles as a function of temperature signal the approach of two reaction fronts to the surface: one belonging to the Pt/Pt2Si and the other to the Pt2Si/PtSi interface. An analysis of the evolution of the ellipsometric angles as a function of temperature for different heating rates allows the accurate determination of the average activation energies of the two reactions. From a modeling of the optical data in terms of a specific reaction model further kinetic parameters such as the reaction rate constants and the actual distribution of activation energies have been deduced.

FAU-Autorinnen und Autoren / FAU-Herausgeberinnen und Herausgeber

Hundhausen, Martin apl. Prof. Dr.
Lehrstuhl für Laserphysik
Ley, Lothar Prof. Dr.
Naturwissenschaftliche Fakultät

Zuletzt aktualisiert 2018-09-08 um 21:25