Future challenges in CMOS process modeling

Pichler P, Burenkov A, Lorenz J, Kampen C, Frey L (2010)

Publication Status: Published

Publication Type: Journal article, Original article

Publication year: 2010

Journal

Thin Solid Films Elsevier

Book Volume: 518

Pages Range: 2478-2484

Journal Issue: 9

DOI: 10.1016/j.tsf.2009.09.150

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente

Involved external institutions

Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB) DE Germany (DE)

How to cite

APA:

Pichler, P., Burenkov, A., Lorenz, J., Kampen, C., & Frey, L. (2010). Future challenges in CMOS process modeling. Thin Solid Films, 518(9), 2478-2484. https://doi.org/10.1016/j.tsf.2009.09.150

MLA:

Pichler, P., et al. "Future challenges in CMOS process modeling." Thin Solid Films 518.9 (2010): 2478-2484.

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