Kinetics of platinum silicide formation followed in situ by spectroscopic ellipsometry

Hundhausen M, Ley L (1999)

Publication Type: Journal article

Publication year: 1999

Journal

Journal of Vacuum Science & Technology A American Vacuum Society

Book Volume: 17

Pages Range: 144

Journal Issue: 1

Authors with CRIS profile

Martin Hundhausen Lehrstuhl für Laserphysik Lothar Ley Naturwissenschaftliche Fakultät

How to cite

APA:

Hundhausen, M., & Ley, L. (1999). Kinetics of platinum silicide formation followed in situ by spectroscopic ellipsometry. Journal of Vacuum Science & Technology A, 17(1), 144.

MLA:

Hundhausen, Martin, and Lothar Ley. "Kinetics of platinum silicide formation followed in situ by spectroscopic ellipsometry." Journal of Vacuum Science & Technology A 17.1 (1999): 144.

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