Journal of Vacuum Science & Technology A
Journal Abbreviation: J VAC SCI TECHNOL A
ISSN: 0734-2101
Publisher: American Vacuum Society
Publications (15)
Conductive TiN thin films grown by plasma-enhanced atomic layer deposition: Effects of N-sources and thermal treatments (2023)
Badie C, Tissot H, Sciacca B, Barr M, Bachmann J, Vallée C, Gautier G, et al.
Journal article
Describing mechanical damage evolution through in situ electrical resistance measurements (2023)
Gebhart DD, Krapf A, Merle B, Gammer C, Cordill MJ
Journal article
Hard x-ray photoelectron spectroscopy at a soft x-ray source: Present and future perspectives of hard x-ray photoelectron spectroscopy at BESSY II (2021)
Felix R, Gorgoi M, Wilks RG, Bär M
Journal article
Monte Carlo simulation of the MoS2 sputtering process and the influence of the normalized momentum on residual stresses (2015)
Vierneusel B, Tremmel S, Wartzack S
Journal article, Original article
Conductance enhancement of polymethylmethacrylate bombarded by low-energy ions (2005)
Koval Y, Fistul M, Müller P
Journal article, Original article
Reaction kinetics on supported model catalysts: Molecular beam/in situ time-resolved infrared reflection absorption spectroscopy study of the CO oxidation on alumina supported Pd particles (2001)
Libuda J
Conference contribution
Kinetics of platinum silicide formation followed in situ by spectroscopic ellipsometry (1999)
Hundhausen M, Ley L
Journal article
Interface formation between hydrogen terminated Si (111) and amorphous hydrogenated carbon (a-C:H) (1997)
Ristein J, Ley L
Journal article
Interaction of CO with Pd clusters supported on a thin alumina film (1996)
Libuda J
Conference contribution
STRUCTURAL CHARACTERIZATION OF PLATINUM DEPOSITS SUPPORTED ON ORDERED ALUMINA FILMS (1994)
Libuda J
Journal article