Journal of Vacuum Science & Technology A

Journal Abbreviation: J VAC SCI TECHNOL A
ISSN: 0734-2101
Publisher: American Vacuum Society

Publications (15)


Types of publications

Journal article
Unpublished / Preprint

Publication year



Conductive TiN thin films grown by plasma-enhanced atomic layer deposition: Effects of N-sources and thermal treatments (2023) Badie C, Tissot H, Sciacca B, Barr M, Bachmann J, Vallée C, Gautier G, et al. Journal article Describing mechanical damage evolution through in situ electrical resistance measurements (2023) Gebhart DD, Krapf A, Merle B, Gammer C, Cordill MJ Journal article Hard x-ray photoelectron spectroscopy at a soft x-ray source: Present and future perspectives of hard x-ray photoelectron spectroscopy at BESSY II (2021) Felix R, Gorgoi M, Wilks RG, Bär M Journal article Monte Carlo simulation of the MoS2 sputtering process and the influence of the normalized momentum on residual stresses (2015) Vierneusel B, Tremmel S, Wartzack S Journal article, Original article Conductance enhancement of polymethylmethacrylate bombarded by low-energy ions (2005) Koval Y, Fistul M, Müller P Journal article, Original article Reaction kinetics on supported model catalysts: Molecular beam/in situ time-resolved infrared reflection absorption spectroscopy study of the CO oxidation on alumina supported Pd particles (2001) Libuda J Conference contribution Kinetics of platinum silicide formation followed in situ by spectroscopic ellipsometry (1999) Hundhausen M, Ley L Journal article Interface formation between hydrogen terminated Si (111) and amorphous hydrogenated carbon (a-C:H) (1997) Ristein J, Ley L Journal article Interaction of CO with Pd clusters supported on a thin alumina film (1996) Libuda J Conference contribution STRUCTURAL CHARACTERIZATION OF PLATINUM DEPOSITS SUPPORTED ON ORDERED ALUMINA FILMS (1994) Libuda J Journal article