Tailored Mechanical Properties and Residual Stresses of a-C:H:W Coatings

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Details zur Publikation

Autor(en): Schmid C, Hetzner H, Tremmel S, Hilpert F, Durst K
Zeitschrift: Advanced Materials Research
Jahr der Veröffentlichung: 2014
Band: 996
Seitenbereich: 14–21
ISSN: 1022-6680
Sprache: Englisch


In this study, three different a-C:H:W coatings with predefined hardness values, ranging from 10 up to 16 GPa, were deposited by selecting suitable parameter set points and adjusting substrate bias voltage of the reactive unbalanced magnetron sputtering process according to a previously created regression model. To obtain this model, the four main process parameters had been varied according to a central composite design and their influence on the mechanical properties of the a-C:H:W coating had been investigated previously by nanoindentation. The three coating variants of this study were investigated in terms of microstructure, mechanical properties and residual stresses. It turned out, that by the use of the regression model, indeed a-C:H:W coatings of tailored mechanical properties can be deposited. Residual stresses were measured by means of focused ion beam milling of a double-slit geometry, which causes the internal stresses to relax, and mapping of the resultant relief strain by digital image correlation. A nearly linear relation between the applied bias voltage and the hardness, the modulus of elasticity of the coating as well as the determined relief strain was observed. Thus, residual stresses of the coatings increase disproportionately with applied bias voltage. The obtained results can be helpful for tailored coating design and further optimization of a-C:H:W coatings.

FAU-Autoren / FAU-Herausgeber

Durst, Karsten PD Dr.
Lehrstuhl für Werkstoffwissenschaften (Allgemeine Werkstoffeigenschaften)
Hetzner, Harald
Lehrstuhl für Konstruktionstechnik
Schmid, Christoph
Lehrstuhl für Werkstoffwissenschaften (Allgemeine Werkstoffeigenschaften)
Tremmel, Stephan Dr.-Ing.
Lehrstuhl für Konstruktionstechnik


Schmid, C., Hetzner, H., Tremmel, S., Hilpert, F., & Durst, K. (2014). Tailored Mechanical Properties and Residual Stresses of a-C:H:W Coatings. Advanced Materials Research, 996, 14–21. https://dx.doi.org/10.4028/www.scientific.net/AMR.996.14

Schmid, Christoph, et al. "Tailored Mechanical Properties and Residual Stresses of a-C:H:W Coatings." Advanced Materials Research 996 (2014): 14–21.


Zuletzt aktualisiert 2018-12-07 um 06:23