Cross-Sectional Scanning Tunneling and Scanning Force Microscopy of Amorphous Hydrogenated Silicon pn-Doping-Superlattices in Nitrogen and Air

Journal article


Publication Details

Author(s): Hundhausen M, Ley L
Journal: Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
Publication year: 1994
Volume: 12
Pages range: 2440
ISSN: 0734-211X


FAU Authors / FAU Editors

Hundhausen, Martin apl. Prof. Dr.
Lehrstuhl für Laserphysik
Ley, Lothar Prof. Dr.
Naturwissenschaftliche Fakultät

Last updated on 2018-09-08 at 04:53