Influence of diverse post-trench processes on the electrical performance of 4H-SiC MOS structures

Banzhaf C, Grieb M, Trautmann A, Bauer A, Frey L (2014)

Publication Status: Published

Publication Type: Authored book, Volume of book series

Publication year: 2014

Publisher: Trans Tech Publications Ltd

Pages Range: 595-598

Event location: Miyazaki

ISBN: 9783038350101

DOI: 10.4028/www.scientific.net/MSF.778-780.595

Authors with CRIS profile

Christian Banzhaf Lehrstuhl für Elektronische Bauelemente Lothar Frey Lehrstuhl für Elektronische Bauelemente

Involved external institutions

Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB) DE Germany (DE)

How to cite

APA:

Banzhaf, C., Grieb, M., Trautmann, A., Bauer, A., & Frey, L. (2014). Influence of diverse post-trench processes on the electrical performance of 4H-SiC MOS structures. Trans Tech Publications Ltd.

MLA:

Banzhaf, Christian, et al. Influence of diverse post-trench processes on the electrical performance of 4H-SiC MOS structures. Trans Tech Publications Ltd, 2014.

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