Influence of annealing parameters on surface roughness, mobility, and contact resistance of aluminium implanted 4H SiC

Schmitt H, Haeublein V, Bauer A, Frey L (2011)

Publication Status: Published

Publication Type: Authored book, Volume of book series

Publication year: 2011

Pages Range: 417-420

Event location: Oslo

ISBN: 9783037850794

DOI: 10.4028/www.scientific.net/MSF.679-680.417

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente

Involved external institutions

Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB) DE Germany (DE)

How to cite

APA:

Schmitt, H., Haeublein, V., Bauer, A., & Frey, L. (2011). Influence of annealing parameters on surface roughness, mobility, and contact resistance of aluminium implanted 4H SiC.

MLA:

Schmitt, H., et al. Influence of annealing parameters on surface roughness, mobility, and contact resistance of aluminium implanted 4H SiC. 2011.

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