Integration of field emitters into scanning probe microscopy sensors using focused ion and electron beams

Lehrer C, Frey L, Petersen S, Ryssel H, Schäfer M, Sulzbach T (2004)

Publication Status: Published

Publication Type: Journal article, Original article

Publication year: 2004

Journal

Journal of Vacuum Science & Technology B American Institute of Physics (AIP)

Book Volume: 22

Pages Range: 1402-1406

Journal Issue: 3

URI: https://www.scopus.com/record/display.uri?eid=2-s2.0-3242722353∨igin=inward

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente Heiner Ryssel Technische Fakultät

Involved external institutions

Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB) DE Germany (DE)

How to cite

APA:

Lehrer, C., Frey, L., Petersen, S., Ryssel, H., Schäfer, M., & Sulzbach, T. (2004). Integration of field emitters into scanning probe microscopy sensors using focused ion and electron beams. Journal of Vacuum Science & Technology B, 22(3), 1402-1406.

MLA:

Lehrer, C., et al. "Integration of field emitters into scanning probe microscopy sensors using focused ion and electron beams." Journal of Vacuum Science & Technology B 22.3 (2004): 1402-1406.

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