Investigations into the wear of a WL10 ion source

Haeublein V, Sadrawetz S, Frey L, Martinz HP, Ryssel H (2005)

Publication Status: Published

Publication Type: Journal article, Original article

Publication year: 2005

Journal

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Elsevier

Book Volume: 237

Pages Range: 341-345

DOI: 10.1016/j.nimb.2005.05.011

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente Heiner Ryssel Technische Fakultät

Involved external institutions

Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB) DE Germany (DE)

How to cite

APA:

Haeublein, V., Sadrawetz, S., Frey, L., Martinz, H.-P., & Ryssel, H. (2005). Investigations into the wear of a WL10 ion source. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 237, 341-345. https://doi.org/10.1016/j.nimb.2005.05.011

MLA:

Haeublein, Volker, et al. "Investigations into the wear of a WL10 ion source." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 237 (2005): 341-345.

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